Gas Analysis Applications • UHP Nitrogen • UHP Argon • UHP Helium • UHP Hydrogen

The superior performance of atmospheric pressure ionization mass spectrometers (API-MS) combined with state-of-the-art electronics and the most powerful process analysis software available makes the Thermo Scientific APIX line the analyzer system of choice for continuous quality control of bulk gases in the semiconductor and electronics industries. An API-MS offers a cost-effective alternative to conventional quality control techniques, allowing each bulk gas to be monitored for a range of potential contaminants, while achieving lower detection limits (up to 100 times better) than any other technology.  The APIX line provides a more complete analysis of impurities, including H2, CO, CO2, H2O, O2, CH4, Kr and Xe with other impurities available. With the advent of 300 mm wafer manufacturing placing even tighter impurity controls on gas quality standards, this technology will continue to be the preferred method for ppt level detection.

Features and Benefits • Fast online measurement (typically <5 s) enables immediate response to gas supply upset conditions • Fully integrated multi-analyzer analysis provides rapid contamination detection • Superior sensitivity with lower detection capability of <10 ppt provides gas analysis suitable for the most stringent quality requirements today and in the future • Backup capability allows each API-MS  to support multi-stream analysis during individual API maintenance • Industry standard communications protocols for plant control and integration (OPC, DDE, Modbus, Siemens 3964R, PROFIBUS, etc.)